3022

The Model 3022 is a piezoresistive silicon accelerometer. It is packaged on a ceramic substrate with an epoxy sealed ceramic cover and is designed for adhesive mounting. A detailed calibration sheet provides test data and resistor compensation values for each sensor.

The 3022 consists of a micro machined silicon mass suspended by multiple beams from a silicon frame. Piezoresistors located in the beams change their resistance as the motion of the suspended mass changes the strain in the beams. Silicon caps on the top and bottom of the device are added to provide over-range stops. This design provides for a very low profile, high shock resistance, durability and built-in damping over a wide usable bandwidth. Each sensor is individually serialized.

For 3022 with a mounting bracket designed to bolt the sensor to a mounting location, see the Model 3028. Please refer to the Models 3052 and 3058 for accelerometers with integral temperature compensation.