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Part Number: MS767
Description: The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mount...
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MS767
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DataSheet
General Description
MS767 General Description
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference pressure.
MS767 Maximum Ratings
| Parameter | Symbol | Conditions | Min |
Max |
Unit |
| Supply voltage | VS+ | Ta = 25 |
20 |
V | |
| Storage temperature | TS | -40 |
+150 |
| |
| Pressure overload |
35 |
Bar |
MS767 Features
` Uncompensated pressure sensor die
` Linearity 0.15% (typical)
` Output Span 392mV @ 5V
` Die Size 1.72 x 1.58mm
` Temperature Range -40°.+125°C
` Low Cost, High reliability
` Linearity 0.15% (typical)
` Output Span 392mV @ 5V
` Die Size 1.72 x 1.58mm
` Temperature Range -40°.+125°C
` Low Cost, High reliability
MS767 Typical Application
· For absolute pressure sensor systems
· Tire pressure measurements
· Electronic scales
· Tire pressure measurements
· Electronic scales
MS767A-0.2
PDF/DataSheet Download
- Datasheet: MS767A-0.2
- File Size: 219837 KB
- Manufacturer: INTERSEMA [Intersema Sensoric SA]
- Click here to Download
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