Features: `Greatly improved sensitivity stability even after exposure to ArF (=193 nm) excimer laser`Windowless package *1Application·ArF excimer laser detection·Various UV detectionSpecifications Parameter Symbol Value Value Reverse voltageOperating temperature *2Storage temperat...
S10043: Features: `Greatly improved sensitivity stability even after exposure to ArF (=193 nm) excimer laser`Windowless package *1Application·ArF excimer laser detection·Various UV detectionSpecifications ...
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| Parameter |
Symbol |
Value |
Value |
| Reverse voltage Operating temperature *2 Storage temperature *2 |
VR Max. Topr Tstg |
5 -20 to +60 -55 to +80 |
V °C °C |
S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, S10043 shows almost no change in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm2.