ASML is preparing to push its next generation EUV machines

Published:2012/7/18 22:47:00 Author:Ecco From:SeekIC

According to Eric Meurice, CEO of lithography equipment vendor ASML Holding NV (Veldhoven, The Netherlands), the company is preparing to push its next generation extreme ultra violet (EUV) lithography machines. What’s more, the throughputs can reach expects of customers.

EUV lithography is considered as necessary to allow continued miniaturization of circuits by most of the industry. The technology has been developed for nearly a decade. But it is still in the trouble of low power light sources that prevent machines reaching bench mark wafer throughputs in excess of 100 wafers per hour.

Meurice provided more EUV information than previously as the company gets close to shipping its NXE: 3300 commercial EUV machine at a conference which is held to discuss the company’s somewhat tepid second quarter financial results with financial analysts. The roll out of the first 11 "process development" machines, capable of handling 300-mm diameter wafers.

ASML has 11 of the NXE: 3300 machines on order but these are now likely to be delivered to customers in 2013, Meurice said. The final integration of the first NXE: 3300 at ASML is expected in October or November. However, the NXE: 3300 machines will result in 800 million euro (about $980 million) of revenue for ASML in 2013.

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